single reticle field (≈26×33 mm) — the area limit every advanced-packaging technique exists to defeat
858 mm² (26 × 33 mm)derived
| Value kind | derived — Derived values are guide calculations; their result is only as fixed as the stated inputs, scope, and method. |
|---|---|
| Scope | A named lithography scanner exposure field, not a guarantee of usable die area, yield or a stitched interposer ceiling. Guide rectangle area: 26 × 33 = 858 mm². |
| As of | 2026-09 |
| Source | ASML — TWINSCAN NXT:1965Ci specification, maximum exposure field 26 × 33 mm; guide area conversion. · Specifications: maximum exposure field 26 × 33 mm. |
| Derivation | Guide rectangle-area conversion of ASML’s 26 × 33 mm maximum exposure field: 26 × 33 = 858 mm². The field dimensions are the specification; the area is arithmetic. |
| Review | checking…review by 2026-09-22 · standard cadence |
| Recorded changes | last 2026-09-16 · 3 revisions tracked |
| Claim id | single-reticle-field-26-and-times-33-and-nbsp |
Where the guide uses it
← Full numbers register — every date-stamped figure in the guide, with revision history.